News Detail
Innovative Applications of Quartz Glass Tubes in the Semiconductor Industry: Ensuring 99.99% Purity
In the fast-evolving semiconductor industry, the demand for ultra-clean, high-temperature-resistant materials has never been higher. Among the materials that meet these stringent requirements, quartz glass tubes stand out for their exceptional thermal stability, chemical inertness, and unmatched purity—up to 99.99% SiO₂. These properties make quartz tubing indispensable in the fabrication of cutting-edge semiconductor devices.
1. Purity as a Foundation for Precision
Semiconductor manufacturing requires an ultra-clean environment where even trace contaminants can compromise yield and performance. Quartz glass tubes are produced through specialized refining and melting processes, resulting in 99.99%+ purity levels. This ensures no metal ion contamination, which is crucial for maintaining the integrity of wafer processing.
2. High-Temperature Endurance
Quartz tubes are widely used in diffusion furnaces and LPCVD/PECVD systems, where temperatures can exceed 1000°C. Their ability to withstand extreme heat without deformation or crystallization ensures consistent performance during prolonged thermal cycles.
3. Optical and Structural Stability
Quartz is optically transparent to UV and IR light, making it suitable for photolithography and optical sensor applications. Its low thermal expansion and dimensional stability help maintain precision alignment within reaction chambers and gas flow systems.
4. Emerging Applications
As semiconductor nodes shrink and cleanroom standards rise, quartz tubes are now used in plasma etching, rapid thermal processing (RTP), and atomic layer deposition (ALD). These applications demand materials that are not only chemically stable but also free from particulates and defects.
Conclusion
With ultra-high purity, thermal reliability, and chemical resilience, quartz glass tubes are not just a support material—they are a technological enabler in advanced semiconductor manufacturing.
